Ki Sang EUM
11Patents
0h-index
26Co-inventors
37Inventor score
Filing activity: Nov 25, 2019 → Oct 17, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US12228861B2 | Apparatus for treating substrate | Electricity | 0 | Active |
| US11766765B2 | Substrate treatment apparatus | Electricity | 0 | Active |
| US12174553B2 | Support unit, bake apparatus and substrate treating apparatus including the same | Electricity | 0 | Active |
| US12125717B2 | Apparatus for treating substrate | Electricity | 0 | Active |
| US11782348B2 | Apparatus for treating substrate | Electricity | 0 | Active |
| US12331736B2 | Pump, chemical liquid supplying unit, and substrate treating apparatus | Physics | 0 | Active |
| US12428730B2 | Apparatus for treating substrate | Electricity | 0 | Active |
| US12140868B2 | Substrate treating apparatus with exhaust airflow guide | Performing Operations; Transporting | 0 | Active |
| US11656557B2 | Apparatus for treating substrate | Electricity | 0 | Active |
| US12124169B2 | Nozzle standby port, apparatus for treating substrate including the same and method for cleaning nozzle using the same | Electricity | 0 | Active |
| US12429042B2 | Torsion pump and chemical liquid supply unit | Mechanical Engineering; Lighting; Heating | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.