Inventor · Cheonan-si, KR

Ki Sang EUM

11Patents
0h-index
26Co-inventors
37Inventor score

Filing activity: Nov 25, 2019 → Oct 17, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US12228861B2 Apparatus for treating substrate Electricity 0 Active
US11766765B2 Substrate treatment apparatus Electricity 0 Active
US12174553B2 Support unit, bake apparatus and substrate treating apparatus including the same Electricity 0 Active
US12125717B2 Apparatus for treating substrate Electricity 0 Active
US11782348B2 Apparatus for treating substrate Electricity 0 Active
US12331736B2 Pump, chemical liquid supplying unit, and substrate treating apparatus Physics 0 Active
US12428730B2 Apparatus for treating substrate Electricity 0 Active
US12140868B2 Substrate treating apparatus with exhaust airflow guide Performing Operations; Transporting 0 Active
US11656557B2 Apparatus for treating substrate Electricity 0 Active
US12124169B2 Nozzle standby port, apparatus for treating substrate including the same and method for cleaning nozzle using the same Electricity 0 Active
US12429042B2 Torsion pump and chemical liquid supply unit Mechanical Engineering; Lighting; Heating 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.