Inventor · Burlington, ON, CA

Marina Zelner

23Patents
4h-index
9Co-inventors
52Inventor score

Filing activity: May 8, 2008 → Dec 11, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US8154850B2 Systems and methods for a thin film capacitor having a composite high-k thin film stack Electricity 13 Active
US8693162B2 Electrostrictive resonance suppression for tunable capacitors Electricity 8 Active
US8664704B2 Electronic component with reactive barrier and hermetic passivation layer Electricity 6 Active
US9318266B2 Electrostrictive resonance suppression for tunable capacitors Electricity 4 Active
US10297658B2 Method and apparatus for a thin film dielectric stack Electricity 4 Active
US8867189B2 Systems and methods for a thin film capacitor having a composite high-K thin film stack Electricity 3 Active
US9404175B2 Method of forming a target for deposition of doped dielectric films by sputtering Chemistry; Metallurgy 3 Active
US10115527B2 Thin film dielectric stack Electricity 2 Active
US10923286B2 Method and apparatus for compensating for high thermal expansion coefficient mismatch of a stacked device Electricity 1 Active
US8822235B2 Electronic component with reactive barrier and hermetic passivation layer Electricity 0 Active
US8361811B2 Electronic component with reactive barrier and hermetic passivation layer Electricity 0 Active
US10896950B2 Method and apparatus for a thin film dielectric stack Electricity 0 Active
US10825612B2 Tunable coplanar capacitor with vertical tuning and lateral RF path and methods for manufacturing thereof Electricity 0 Active
US8461637B2 Electronic component with reactive barrier and hermetic passivation layer Electricity 0 Active
US11657981B2 Method and apparatus for compensating for high Thermal Expansion Coefficient mismatch of a stacked device Electricity 0 Active
US9424993B2 Systems and methods for a thin film capacitor having a composite high-K thin film stack Electricity 0 Active
US8194387B2 Electrostrictive resonance suppression for tunable capacitors Electricity 0 Active
US11274363B2 Method of forming a sputtering target Electricity 0 Active
US11444150B2 Method and apparatus for a thin film dielectric stack Electricity 0 Active
US10770540B2 Small-gap coplanar tunable capacitors and methods for manufacturing thereof Electricity 0 Active
US10497774B2 Small-gap coplanar tunable capacitors and methods for manufacturing thereof Electricity 0 Active
US10332687B2 Tunable coplanar capacitor with vertical tuning and lateral RF path and methods for manufacturing thereof Electricity 0 Active
US9490314B1 High-throughput deposition of a voltage-tunable dielectric material Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.