Mark P. Murray
8Patents
7h-index
22Co-inventors
55Inventor score
Filing activity: Nov 6, 1997 → Oct 16, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6436814B1 | Interconnection structure and method for fabricating same | Electricity | 47 | Expired |
| US6190237A | pH-buffered slurry and use thereof for polishing | Chemistry; Metallurgy | 46 | Expired |
| US6221775A | Combined chemical mechanical polishing and reactive ion etching process | Electricity | 28 | Expired |
| US6426558B1 | Metallurgy for semiconductor devices | Electricity | 16 | Expired |
| US6982227B2 | Single and multilevel rework | Electricity | 12 | Expired |
| US6674168B1 | Single and multilevel rework | Electricity | 10 | Expired |
| US7052625B2 | Slurry and use thereof for polishing | Electricity | 7 | Expired |
| US6653737B2 | Interconnection structure and method for fabricating same | Electricity | 6 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.