Martin S. Wohlert
12Patents
4h-index
32Co-inventors
56Inventor score
Filing activity: Aug 22, 2005 → Feb 9, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8066551B2 | Retaining ring with shaped surface | Emerging Cross-Sectional Technologies | 12 | Active |
| US7927190B2 | Retaining ring with shaped surface | Emerging Cross-Sectional Technologies | 7 | Active |
| US8585468B2 | Retaining ring with shaped surface | Emerging Cross-Sectional Technologies | 6 | Active |
| US7210988B2 | Method and apparatus for reduced wear polishing pad conditioning | Performing Operations; Transporting | 4 | Expired |
| US9937601B2 | Retaining ring with Shaped Surface | Emerging Cross-Sectional Technologies | 4 | Active |
| US9412619B2 | Method of outgassing a mask material deposited over a workpiece in a process tool | Electricity | 3 | Active |
| US11260500B2 | Retaining ring with shaped surface | Emerging Cross-Sectional Technologies | 3 | Active |
| US10766117B2 | Retaining ring with shaped surface | Emerging Cross-Sectional Technologies | 3 | Active |
| US9186773B2 | Retaining ring with shaped surface | Emerging Cross-Sectional Technologies | 2 | Active |
| US11577361B2 | Retaining ring with shaped surface and method of forming | Emerging Cross-Sectional Technologies | 0 | Active |
| US7879255B2 | Method and composition for electrochemically polishing a conductive material on a substrate | Performing Operations; Transporting | 0 | Active |
| US11850703B2 | Method of forming retaining ring with shaped surface | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.