Inventor · Hitachi, JP

Michio Ohue

15Patents
10h-index
29Co-inventors
68Inventor score

Filing activity: Apr 13, 1989 → Mar 24, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US5307304A Semiconductor memory device and method of operation thereof Electricity 62 Expired
US5211825A Plasma processing apparatus and the method of the same Electricity 38 Expired
US5496410A Plasma processing apparatus and method of processing substrates by using same apparatus Chemistry; Metallurgy 32 Expired
US5629888A Semiconductor memory device and method of operation thereof Electricity 28 Expired
US5745336A Capacitor for semiconductor integrated circuit Electricity 21 Expired
US5162633A Microwave-excited plasma processing apparatus Electricity 18 Expired
US5084355A Laminar structure comprising organic material and inorganic material Emerging Cross-Sectional Technologies 17 Expired
US5178962A Metal-organic macromolecular synthetic resin composite and process for producing the same Emerging Cross-Sectional Technologies 16 Expired
US5936832A Semiconductor memory device and method of operation thereof Electricity 14 Expired
US5434742A Capacitor for semiconductor integrated circuit and method of manufacturing the same Electricity 13 Expired
US5182495A Plasma processing method and apparatus using electron cyclotron resonance Electricity 9 Expired
US5347100A Semiconductor device, process for the production thereof and apparatus for microwave plasma treatment Electricity 7 Expired
US5107307A Semiconductor device for control of light Physics 7 Expired
US5233216A Dielectric isolated substrate and process for producing the same Electricity 3 Expired
US6940741B2 Semiconductor memory device and methods of operation thereof Electricity 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.