Inventor · Hitachi, JP

Munehiro Oota

6Patents
1h-index
18Co-inventors
40Inventor score

Filing activity: Dec 24, 2010 → May 29, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US8853082B2 Polishing liquid for CMP and polishing method using the same Electricity 14 Active
US10155886B2 Polishing liquid for CMP, and polishing method Electricity 1 Active
US9564337B2 Polishing liquid and method for polishing substrate using the polishing liquid Electricity 0 Active
US9022834B2 Polishing solution for CMP and polishing method using the polishing solution Chemistry; Metallurgy 0 Active
US9966269B2 Polishing liquid for CMP, polishing liquid set for CMP, and polishing method Electricity 0 Active
US8592317B2 Polishing solution for CMP and polishing method using the polishing solution Chemistry; Metallurgy 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.