Inventor · Coswig, DE

Peter Huebler

6Patents
3h-index
12Co-inventors
46Inventor score

Filing activity: Mar 30, 2004 → Oct 29, 2008

Most-cited inventions

PatentTitleAreaCited byStatus
US7416992B2 Method of patterning a low-k dielectric using a hard mask Emerging Cross-Sectional Technologies 4 Active
US7183629B2 Metal line having an increased resistance to electromigration along an interface of a dielectric barrier layer by implanting material into the metal line Electricity 4 Expired
US8039395B2 Technique for forming embedded metal lines having increased resistance against stress-induced material transport Electricity 4 Active
US8097542B2 Etch stop layer of reduced thickness for patterning a dielectric material in a contact level of closely spaced transistors Emerging Cross-Sectional Technologies 1 Active
US7063091B2 Method for cleaning the surface of a substrate Electricity 0 Expired
US8698312B2 Semiconductor device including a hybrid metallization layer stack for enhanced mechanical strength during and after packaging Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.