Inventor · Stuttgart, DE

Peter Nehmiz

13Patents
10h-index
10Co-inventors
61Inventor score

Filing activity: May 8, 1978 → Jan 25, 1985

Most-cited inventions

PatentTitleAreaCited byStatus
US4426584A Method of compensating the proximity effect in electron beam projection systems Electricity 52 Expired
US4448865A Shadow projection mask for ion implantation and ion beam lithography Electricity 44 Expired
US4370554A Alignment system for particle beam lithography Electricity 27 Expired
US4417946A Method of making mask for structuring surface areas Emerging Cross-Sectional Technologies 26 Expired
US4504558A Method of compensating the proximity effect in electron beam projection systems Electricity 24 Expired
US4591540A Method of transferring a pattern into a radiation-sensitive layer Physics 22 Expired
US4169230A Method of exposure by means of corpuscular beam shadow printing Electricity 19 Expired
US4554458A Electron beam projection lithography Electricity 13 Expired
US4513203A Mask and system for mutually aligning objects in ray exposure systems Electricity 12 Expired
US4578587A Error-corrected corpuscular beam lithography Electricity 12 Expired
US4334156A Method of shadow printing exposure Electricity 10 Expired
US4342817A Mask for structuring surface areas, and method of making it Emerging Cross-Sectional Technologies 10 Expired
US4267259A Exposure process Emerging Cross-Sectional Technologies 3 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.