Ping-Hsu Chen
16Patents
3h-index
38Co-inventors
56Inventor score
Filing activity: Jun 13, 2002 → Nov 5, 2020
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7144297B2 | Method and apparatus to enable accurate wafer prediction | Physics | 20 | Expired |
| US7634325B2 | Prediction of uniformity of a wafer | Electricity | 8 | Active |
| US8682466B2 | Automatic virtual metrology for semiconductor wafer result prediction | Physics | 8 | Active |
| US6926584B2 | Dual mode hybrid control and method for CMP slurry | Performing Operations; Transporting | 3 | Expired |
| US11027965B2 | Cap rotation device | Performing Operations; Transporting | 2 | Active |
| US8409993B2 | Method and system for controlling copper chemical mechanical polish uniformity | Electricity | 2 | Active |
| US10425597B2 | Combined visible and infrared image sensor incorporating selective infrared optical filter | Electricity | 1 | Active |
| US9667933B2 | Color and infrared filter array patterns to reduce color aliasing | Electricity | 1 | Active |
| US6884149B2 | Method and system for in-situ monitoring of mixing ratio of high selectivity slurry | Performing Operations; Transporting | 0 | Expired |
| US11022018B2 | Exhaust system and method of using | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US10964744B1 | Light control for improved near infrared sensitivity and channel separation | Electricity | 0 | Active |
| US11324101B2 | Active fluid static elimination system | Physics | 0 | Active |
| US6729935B2 | Method and system for in-situ monitoring of mixing ratio of high selectivity slurry | Performing Operations; Transporting | 0 | Expired |
| US11203451B2 | Multifunction cap replacement module | Performing Operations; Transporting | 0 | Active |
| US10473021B2 | Exhaust system and method of using | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US9781362B1 | Flare-reducing imaging system and associated image sensor | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.