Rennie Barber
9Patents
6h-index
4Co-inventors
52Inventor score
Filing activity: Sep 7, 1993 → Jul 28, 2003
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6837967B1 | Method and apparatus for cleaning deposited films from the edge of a wafer | Electricity | 53 | Expired |
| US6898064B1 | System and method for optimizing the electrostatic removal of a workpiece from a chuck | Electricity | 33 | Expired |
| US6849936B1 | System and method for using film deposition techniques to provide an antenna within an integrated circuit package | Electricity | 17 | Expired |
| US6874510B2 | Method to use a laser to perform the edge clean operation on a semiconductor wafer | Electricity | 13 | Expired |
| US5497727A | Cooling element for a semiconductor fabrication chamber | Mechanical Engineering; Lighting; Heating | 7 | Expired |
| US5942038A | Cooling element for a semiconductor fabrication chamber | Mechanical Engineering; Lighting; Heating | 6 | Expired |
| US6627466B1 | Method and apparatus for detecting backside contamination during fabrication of a semiconductor wafer | Electricity | 3 | Expired |
| US6869893B2 | Laminate low K film | Electricity | 2 | Expired |
| US6943055B2 | Method and apparatus for detecting backside contamination during fabrication of a semiconductor wafer | Electricity | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.