Sachio Uto
77Patents
15h-index
37Co-inventors
84Inventor score
Filing activity: Nov 3, 1983 → Oct 21, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6621571B1 | Method and apparatus for inspecting defects in a patterned specimen | Physics | 74 | Expired |
| US7248352B2 | Method for inspecting defect and apparatus for inspecting defect | Physics | 63 | Expired |
| US4669875A | Foreign particle detecting method and apparatus | Physics | 52 | Expired |
| US6556290B2 | Defect inspection method and apparatus therefor | Physics | 40 | Expired |
| US6943086B2 | Laser annealing apparatus, TFT device and annealing method of the same | Electricity | 36 | Expired |
| US7465935B2 | Method for inspecting pattern defect and device for realizing the same | Physics | 36 | Expired |
| US4922308A | Method of and apparatus for detecting foreign substance | Physics | 34 | Expired |
| US6800859B1 | Method and equipment for detecting pattern defect | Physics | 29 | Expired |
| US7333192B2 | Apparatus and method for inspecting defects | Physics | 26 | Active |
| US7528942B2 | Method and apparatus for detecting defects | Physics | 18 | Active |
| US5135303A | Method of and apparatus for inspecting surface defects | Physics | 18 | Expired |
| US4676637A | Exposure apparatus with foreign particle detector | Physics | 18 | Expired |
| US6576559B2 | Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses | Electricity | 16 | Expired |
| US4725737A | Alignment method and apparatus for reduction projection type aligner | Physics | 15 | Expired |
| US7129124B2 | Display device, process of fabricating same, and apparatus for fabricating same | Electricity | 15 | Expired |
| US7851753B2 | Method and apparatus for reviewing defects | Electricity | 14 | Active |
| US7369223B2 | Method of apparatus for detecting particles on a specimen | Physics | 14 | Active |
| US6355570B1 | Semiconductor manufacturing methods, plasma processing methods and plasma processing apparatuses | Physics | 13 | Expired |
| US7218389B2 | Method and apparatus for inspecting pattern defects | Physics | 12 | Expired |
| US7417721B2 | Defect detector and defect detecting method | Physics | 11 | Expired |
| US4701050A | Semiconductor exposure apparatus and alignment method therefor | Physics | 10 | Expired |
| US7859656B2 | Defect inspection method and system | Physics | 10 | Active |
| USRE33991E | Foreign particle detecting method and apparatus | General | 9 | Expired |
| US6721047B2 | Method and apparatus for inspecting defects of a specimen | Physics | 9 | Expired |
| US6943876B2 | Method and apparatus for detecting pattern defects | Physics | 8 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.