Seiki Ishida
13Patents
6h-index
12Co-inventors
59Inventor score
Filing activity: May 10, 2001 → May 9, 2016
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8443513B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 18 | Active |
| US6579370B2 | Apparatus and method for coating treatment | Physics | 14 | Expired |
| US8154106B2 | Coating and developing system and coating and developing method | Electricity | 12 | Active |
| US7563042B2 | Substrate carrying apparatus, substrate carrying method, and coating and developing apparatus | Emerging Cross-Sectional Technologies | 12 | Active |
| US7809460B2 | Coating and developing apparatus, coating and developing method and storage medium in which a computer-readable program is stored | Electricity | 11 | Active |
| US6620245B2 | Liquid coating apparatus with temperature controlling manifold | Electricity | 11 | Expired |
| US8033244B2 | Substrate processing system | Electricity | 6 | Active |
| US10553421B2 | Substrate processing apparatus, substrate processing method and storage medium | Electricity | 6 | Active |
| US8303232B2 | Substrate processing system | Electricity | 3 | Active |
| US7284917B2 | Coating and developing system and coating and developing method | Emerging Cross-Sectional Technologies | 1 | Expired |
| US9052610B2 | Coating and developing system and coating and developing method | Electricity | 1 | Active |
| US10290518B2 | Substrate liquid processing apparatus | Electricity | 0 | Active |
| US9889476B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.