Seok Heo
17Patents
2h-index
71Co-inventors
53Inventor score
Filing activity: Jul 5, 2007 → Feb 7, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US9316357B2 | Pressure vessel | Emerging Cross-Sectional Technologies | 5 | Active |
| US7719161B2 | Method of designing rotary thermal actuator and rotary thermal actuator | Mechanical Engineering; Lighting; Heating | 3 | Active |
| US8378582B2 | Plasma lighting system | Emerging Cross-Sectional Technologies | 2 | Active |
| US9889556B2 | Link structure | Emerging Cross-Sectional Technologies | 1 | Active |
| US11315817B2 | Apparatus for transferring wafer, method for transferring wafer using the same with three sensors | Electricity | 1 | Active |
| US10553464B2 | System and method for controlling semiconductor manufacturing facility, method of manufacturing integrated circuit using the system and method, and method of manufacturing processor using the system and method | Emerging Cross-Sectional Technologies | 1 | Active |
| US11027394B2 | Load cup and chemical mechanical polishing apparatus and method of manufacturing including the same | Electricity | 1 | Active |
| US10274132B2 | Multi-sealed nozzle and pressure vessel including the same | Emerging Cross-Sectional Technologies | 1 | Active |
| US11733616B2 | System for supplying photoresist and method for fabricating semiconductor device using the same | Electricity | 0 | Active |
| US12270594B2 | Refrigerator | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US10767814B2 | Pressure vessel equipped with permeated gas discharging structure | Emerging Cross-Sectional Technologies | 0 | Active |
| US8410700B2 | Electrodeless lighting system and control method thereof | Emerging Cross-Sectional Technologies | 0 | Active |
| US11726406B2 | Method of coating a photoresist and apparatus for performing the same | Electricity | 0 | Active |
| US12372885B2 | Substrate processing apparatus and method of fabricating semiconductor device using the same | Electricity | 0 | Active |
| US12281757B2 | Pressure vessel | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US11927890B1 | Substrate processing apparatus and method of fabricating semiconductor device using the same | Electricity | 0 | Active |
| US11456195B2 | Wafer processing apparatus and wafer processing method using the same apparatus | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.