Setsu Suzuki
6Patents
4h-index
9Co-inventors
42Inventor score
Filing activity: Jan 31, 1997 → Mar 15, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6225236A | Method for reforming undercoating surface and method for production of semiconductor device | Electricity | 24 | Expired |
| US5834730A | Plasma processing equipment and gas discharging device | Electricity | 18 | Expired |
| US6124210A | Method of cleaning surface of substrate and method of manufacturing semiconductor device | Emerging Cross-Sectional Technologies | 11 | Expired |
| US6133162A | Method of forming a film by using plasmanized process gas containing gaseous H.sub.2 O and an auxiliary gas in a semiconductor device | Electricity | 7 | Expired |
| US6900144B2 | Film-forming surface reforming method and semiconductor device manufacturing method | Electricity | 4 | Expired |
| US6548426B1 | Method for improving a quality of dielectric layer and semiconductor device | Electricity | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.