Shingo Togashi
44Patents
11h-index
18Co-inventors
68Inventor score
Filing activity: Feb 25, 2010 → Apr 19, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| USD634719S1 | Elastic membrane for semiconductor wafer polishing apparatus | General | 523 | Expired |
| USD793976S1 | Substrate retaining ring | General | 416 | Active |
| USD633452S1 | Elastic membrane for semiconductor wafer polishing apparatus | General | 325 | Expired |
| USD769200S1 | Elastic membrane for semiconductor wafer polishing apparatus | General | 47 | Active |
| USD839224S1 | Elastic membrane for semiconductor wafer polishing | General | 27 | Active |
| USD766849S1 | Substrate retaining ring | General | 25 | Active |
| USD808349S1 | Elastic membrane for semiconductor wafer polishing apparatus | General | 17 | Active |
| USD799437S1 | Substrate retaining ring | General | 14 | Active |
| US8859070B2 | Elastic membrane | Emerging Cross-Sectional Technologies | 13 | Active |
| US9403255B2 | Polishing apparatus and polishing method | Performing Operations; Transporting | 11 | Active |
| USD794585S1 | Retainer ring for substrate | General | 11 | Active |
| USD859332S1 | Elastic membrane for semiconductor wafer polishing | General | 10 | Active |
| USD770990S1 | Elastic membrane for semiconductor wafer polishing apparatus | General | 6 | Active |
| US9573244B2 | Elastic membrane, substrate holding apparatus, and polishing apparatus | Performing Operations; Transporting | 5 | Active |
| USD913977S1 | Elastic membrane for semiconductor wafer polishing | General | 5 | Active |
| USD989012S1 | Elastic membrane | General | 4 | Active |
| US10702972B2 | Polishing apparatus | Electricity | 4 | Active |
| US9662764B2 | Substrate holder, polishing apparatus, and polishing method | Performing Operations; Transporting | 3 | Active |
| US11179823B2 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Performing Operations; Transporting | 2 | Active |
| USD813180S1 | Elastic membrane for semiconductor wafer polishing apparatus | General | 2 | Active |
| US10464185B2 | Substrate polishing method, top ring, and substrate polishing apparatus | Performing Operations; Transporting | 2 | Active |
| US10391603B2 | Polishing apparatus, control method and recording medium | Performing Operations; Transporting | 2 | Active |
| US11548113B2 | Method and apparatus for polishing a substrate | Performing Operations; Transporting | 1 | Active |
| US11088011B2 | Elastic membrane, substrate holding device, and polishing apparatus | Performing Operations; Transporting | 1 | Active |
| US11958163B2 | Substrate holding apparatus, elastic membrane, polishing apparatus, and method for replacing elastic membrane | Electricity | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.