Inventor · Yongin-si, KR

Sunmin MOON

12Patents
2h-index
19Co-inventors
43Inventor score

Filing activity: Feb 6, 2017 → Apr 20, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US10453913B2 Capacitor, semiconductor device and methods of manufacturing the capacitor and the semiconductor device Electricity 3 Active
US10892345B2 Semiconductor device Electricity 2 Active
US10658454B2 Capacitor, semiconductor device and methods of manufacturing the capacitor and the semiconductor device Electricity 2 Active
US11081338B2 Method of forming oxide film including two non-oxygen elements, method of manufacturing semiconductor device, method of forming dielectric film, and semiconductor device Electricity 1 Active
US11621339B2 Semiconductor device including capacitor Electricity 0 Active
US12324145B2 Semiconductor device with capping conductive layer on an electrode and method of fabricating the same Electricity 0 Active
US12334308B2 Batch-type apparatus for atomic layer etching (ALE), and ALE method and semiconductor device manufacturing method based on the same apparatus Electricity 0 Active
US11114541B2 Semiconductor device including capacitor Electricity 0 Active
US10090377B2 Semiconductor device including capacitor Electricity 0 Active
US11764283B2 Semiconductor device including capacitor Electricity 0 Active
US11728160B2 Method of forming oxide film including two non-oxygen elements, method of manufacturing semiconductor device, method of forming dielectric film, and semiconductor device Electricity 0 Active
US11665884B2 Semiconductor device with capping conductive layer on an electrode and method of fabricating the same Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.