Takehiko Senoo
9Patents
2h-index
30Co-inventors
51Inventor score
Filing activity: Aug 7, 1995 → Jan 26, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5759334A | Plasma processing apparatus | Performing Operations; Transporting | 15 | Expired |
| US9214364B2 | Substrate cleaning apparatus and vacuum processing system | Electricity | 2 | Active |
| US9533268B2 | Method and apparatus for supplying mixed gas | Emerging Cross-Sectional Technologies | 0 | Active |
| US12172198B2 | Gas cluster processing device and gas cluster processing method | Electricity | 0 | Active |
| US9159622B2 | Dividing method for wafer | Electricity | 0 | Active |
| US11267021B2 | Gas cluster processing device and gas cluster processing method | Electricity | 0 | Active |
| US8461051B2 | Cluster jet processing method, semiconductor element, microelectromechanical element, and optical component | Performing Operations; Transporting | 0 | Active |
| US11482455B2 | Cutting method of workpiece by forming reformed region and dry etching process | Performing Operations; Transporting | 0 | Active |
| US11380586B2 | Cutting method | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.