Takuya Hagiwara
17Patents
3h-index
16Co-inventors
57Inventor score
Filing activity: Jun 15, 1990 → Oct 12, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6787459B2 | Method for fabricating a semiconductor device | Emerging Cross-Sectional Technologies | 17 | Expired |
| US7883834B2 | Method for forming pattern | Electricity | 6 | Active |
| US7479366B2 | Method for forming pattern | Electricity | 3 | Active |
| US5014417A | Apparatus for assembling ink ribbon feeder roller assemblies of ink ribbon cassettes | Emerging Cross-Sectional Technologies | 3 | Expired |
| US8530145B2 | Method for manufacturing a semiconductor device | Electricity | 2 | Active |
| US7666577B2 | Method for forming pattern | Electricity | 2 | Active |
| US8178983B2 | Water repellant composition for substrate to be exposed, method for forming resist pattern, electronic device produced by the formation method, treatment method for imparting water repellency to substrate to be exposed, water repellant set for substrate to be exposed, and treatment method for imparting water repellency to substrate to be exposed using the same | Physics | 2 | Active |
| US8679727B2 | Developing method for immersion lithography, solvent used for the developing method and electronic device using the developing method | Emerging Cross-Sectional Technologies | 1 | Active |
| US8808970B2 | Manufacturing method of semiconductor device | Electricity | 1 | Active |
| US9748360B2 | Manufacturing method of semiconductor device | Electricity | 0 | Active |
| US9627203B2 | Manufacturing method of semiconductor device | Electricity | 0 | Active |
| US12414346B2 | Manufacturing method of semiconductor device | Electricity | 0 | Active |
| US10121678B2 | Method of manufacturing semiconductor device | Electricity | 0 | Active |
| US9105476B2 | Manufacturing method of semiconductor device | Electricity | 0 | Active |
| US9502282B2 | Method of semiconductor manufacture utilizing layer arrangement to improve autofocus | Electricity | 0 | Active |
| US9847226B2 | Manufacturing method of semiconductor device | Electricity | 0 | Active |
| US8323879B2 | Method of forming resist pattern | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.