Inventor · Sendai, JP

Tatsuhiro Yabune

9Patents
3h-index
13Co-inventors
50Inventor score

Filing activity: Mar 31, 1995 → Aug 4, 2009

Most-cited inventions

PatentTitleAreaCited byStatus
US5714407A Etching agent, electronic device and method of manufacturing the device Chemistry; Metallurgy 28 Expired
US6585910B1 Etchant Electricity 21 Expired
US6027571A Surface treatment for micromachining Electricity 8 Expired
US8470278B2 Processes for production of phosphorus pentafluoride and hexafluorophosphates Emerging Cross-Sectional Technologies 2 Active
US6797194B1 Surface treating for micromachining and method for surface treatment Electricity 2 Expired
US6821452B2 Etchant Electricity 1 Expired
US8066898B2 Surface treatment solution for the fine surface processing of a glass substrate containing multiple ingredients Chemistry; Metallurgy 1 Active
US9731968B2 Process for producing fluoride gas Chemistry; Metallurgy 0 Active
US9059480B2 Process for production hexafluorophosphates Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.