Tatsuhiro Yabune
9Patents
3h-index
13Co-inventors
50Inventor score
Filing activity: Mar 31, 1995 → Aug 4, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5714407A | Etching agent, electronic device and method of manufacturing the device | Chemistry; Metallurgy | 28 | Expired |
| US6585910B1 | Etchant | Electricity | 21 | Expired |
| US6027571A | Surface treatment for micromachining | Electricity | 8 | Expired |
| US8470278B2 | Processes for production of phosphorus pentafluoride and hexafluorophosphates | Emerging Cross-Sectional Technologies | 2 | Active |
| US6797194B1 | Surface treating for micromachining and method for surface treatment | Electricity | 2 | Expired |
| US6821452B2 | Etchant | Electricity | 1 | Expired |
| US8066898B2 | Surface treatment solution for the fine surface processing of a glass substrate containing multiple ingredients | Chemistry; Metallurgy | 1 | Active |
| US9731968B2 | Process for producing fluoride gas | Chemistry; Metallurgy | 0 | Active |
| US9059480B2 | Process for production hexafluorophosphates | Emerging Cross-Sectional Technologies | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.