Timothy Frederick Compton
9Patents
5h-index
6Co-inventors
48Inventor score
Filing activity: Dec 9, 2002 → Apr 7, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6893476B2 | Composition and associated methods for chemical mechanical planarization having high selectivity for metal removal | Emerging Cross-Sectional Technologies | 19 | Expired |
| US7153335B2 | Tunable composition and method for chemical-mechanical planarization with aspartic acid/tolyltriazole | Chemistry; Metallurgy | 16 | Expired |
| US7691287B2 | Method for immobilizing ligands and organometallic compounds on silica surface, and their application in chemical mechanical planarization | Performing Operations; Transporting | 13 | Active |
| US7351662B2 | Composition and associated method for catalyzing removal rates of dielectric films during chemical mechanical planarization | Chemistry; Metallurgy | 6 | Expired |
| US7514363B2 | Chemical-mechanical planarization composition having benzenesulfonic acid and per-compound oxidizing agents, and associated method for use | Electricity | 6 | Expired |
| US7316977B2 | Chemical-mechanical planarization composition having ketooxime compounds and associated method for use | Electricity | 4 | Active |
| US7247179B2 | Composition and associated methods for chemical mechanical planarization having high selectivity for metal removal | Emerging Cross-Sectional Technologies | 1 | Expired |
| US7678702B2 | CMP composition of boron surface-modified abrasive and nitro-substituted sulfonic acid and method of use | Electricity | 1 | Active |
| US9200180B2 | Chemical-mechanical planarization composition having benzenesulfonic acid and per-compound oxidizing agents, and associated method for use | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.