Xi Cen
13Patents
0h-index
47Co-inventors
37Inventor score
Filing activity: Feb 27, 2020 → Oct 28, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11680312B2 | Catalyst enhanced seamless ruthenium gap fill | Electricity | 0 | Active |
| US12094773B2 | Methods for low resistivity and stress tungsten gap fill | Electricity | 0 | Active |
| US11776806B2 | Multi-step pre-clean for selective metal gap fill | Electricity | 0 | Active |
| US12014956B2 | Tungsten gapfill using molybdenum co-flow | Electricity | 0 | Active |
| US11401602B2 | Catalyst enhanced seamless ruthenium gap fill | Electricity | 0 | Active |
| USD1066440S1 | Process chamber pumping liner | General | 0 | Active |
| US11355391B2 | Method for forming a metal gapfill | Electricity | 0 | Active |
| US12159804B2 | Tungsten molybdenum structures | Electricity | 0 | Active |
| US11798845B2 | Methods and apparatus for low resistivity and stress tungsten gap fill | Electricity | 0 | Active |
| US12351909B2 | Gap fill methods using catalyzed deposition | Electricity | 0 | Active |
| US11859277B2 | Catalyst enhanced molybdenum deposition and gap fill | Electricity | 0 | Active |
| US11380536B2 | Multi-step pre-clean for selective metal gap fill | Electricity | 0 | Active |
| US12191198B2 | Low resistivity tungsten film and method of manufacture | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.