Xiaoping Zhou
59Patents
6h-index
105Co-inventors
71Inventor score
Filing activity: May 3, 2006 → Sep 11, 2024
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8633423B2 | Methods and apparatus for controlling substrate temperature in a process chamber | Emerging Cross-Sectional Technologies | 121 | Active |
| US9123762B2 | Substrate support with symmetrical feed structure | Electricity | 36 | Active |
| US8328299B2 | Drawer slide and locking mechanism | Emerging Cross-Sectional Technologies | 23 | Active |
| US8475625B2 | Apparatus for etching high aspect ratio features | Electricity | 14 | Active |
| US10373810B2 | Showerhead having an extended detachable gas distribution plate | Electricity | 9 | Active |
| US8916793B2 | Temperature control in plasma processing apparatus using pulsed heat transfer fluid flow | Electricity | 6 | Active |
| US8440049B2 | Apparatus for etching high aspect ratio features | Electricity | 5 | Active |
| US9067957B2 | Metal nickel-imidazolate chiral nano clathrate complex and preparation method thereof | Emerging Cross-Sectional Technologies | 4 | Active |
| US9801468B2 | Drawer slide and locking mechanism | Emerging Cross-Sectional Technologies | 4 | Active |
| US9011731B2 | Method for preparing negative electrode material of lithium ion battery | Emerging Cross-Sectional Technologies | 4 | Active |
| US9837931B2 | Phased lock loop control for multiple inverters connected to a polyphase grid | Emerging Cross-Sectional Technologies | 4 | Active |
| US9267742B2 | Apparatus for controlling the temperature uniformity of a substrate | Mechanical Engineering; Lighting; Heating | 4 | Active |
| US9105945B2 | Lithium-ion solid battery, and synthesis method and synthesis device thereof | Emerging Cross-Sectional Technologies | 3 | Active |
| US8822876B2 | Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity | Emerging Cross-Sectional Technologies | 3 | Active |
| US9725924B2 | Drawer slide and electronically actuated locking mechanism | Emerging Cross-Sectional Technologies | 3 | Active |
| US10954595B2 | High power showerhead with recursive gas flow distribution | Chemistry; Metallurgy | 3 | Active |
| US9746606B2 | Waveguide structure, waveguide coupling structure, and production method | Physics | 2 | Active |
| US10448738B2 | Drawer slide and locking mechanism | Emerging Cross-Sectional Technologies | 2 | Active |
| US9034523B2 | Organosilicon polymer, solid electrolyte and solid-state lithium-ion battery | Emerging Cross-Sectional Technologies | 2 | Active |
| US9991109B2 | Apparatus for etching high aspect ratio features | Electricity | 2 | Active |
| US9530336B2 | System and method for monitoring a signage system of a transit vehicle | Physics | 2 | Active |
| US8590184B2 | Display device for transportation vehicle | Physics | 2 | Active |
| US8123902B2 | Gas flow diffuser | Emerging Cross-Sectional Technologies | 1 | Active |
| US9281521B2 | Graphite negative material for lithium-ion battery, method for preparing the same and lithium-ion battery | Emerging Cross-Sectional Technologies | 1 | Active |
| US9248509B2 | Multi-zoned plasma processing electrostatic chuck with improved temperature uniformity | Emerging Cross-Sectional Technologies | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.