Inventor · Singapore, SG

Xu Yi

22Patents
6h-index
35Co-inventors
69Inventor score

Filing activity: Jan 24, 2000 → Feb 14, 2019

Most-cited inventions

PatentTitleAreaCited byStatus
US6424044B1 Use of boron carbide as an etch-stop and barrier layer for copper dual damascene metallization Electricity 68 Expired
US6232217A Post treatment of via opening by N-containing plasma or H-containing plasma for elimination of fluorine species in the FSG near the surfaces of the via opening Electricity 32 Expired
US6261942A Dual metal-oxide layer as air bridge Electricity 25 Expired
US6340608B1 Method of fabricating copper metal bumps for flip-chip or chip-on-board IC bonding on terminating copper pads Electricity 14 Expired
US6375857B1 Method to form fuse using polymeric films Electricity 8 Expired
US6429129B1 Method of using silicon rich carbide as a barrier material for fluorinated materials Emerging Cross-Sectional Technologies 7 Expired
US9094593B2 Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules Emerging Cross-Sectional Technologies 6 Active
US6365508B1 Process without post-etch cleaning-converting polymer and by-products into an inert layer Electricity 5 Expired
US6540841B1 Method and apparatus for removing contaminants from the perimeter of a semiconductor substrate Performing Operations; Transporting 3 Expired
US6358821B1 Method of copper transport prevention by a sputtered gettering layer on backside of wafer Electricity 3 Expired
US9543354B2 Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules Electricity 2 Active
US6730591B2 Method of using silicon rich carbide as a barrier material for fluorinated materials Emerging Cross-Sectional Technologies 2 Expired
US6813796B2 Apparatus and methods to clean copper contamination on wafer edge Performing Operations; Transporting 1 Expired
US10186540B2 Optoelectronic modules that have shielding to reduce light leakage or stray light Emerging Cross-Sectional Technologies 1 Active
US10243111B2 Optoelectronic device subassemblies and methods of manufacturing the same Electricity 0 Active
US9859327B2 Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules Electricity 0 Active
US11980548B2 Carbon fiber composite artificial bone and preparation method thereof Textiles; Paper 0 Active
US7060613B2 Method of copper/copper surface bonding using a conducting polymer for application in IC chip bonding Electricity 0 Expired
US10269645B2 Fin field-effect transistor and fabrication method thereof Electricity 0 Active
US11597082B2 Dispatching method and device, and non-transitory readable storage medium Emerging Cross-Sectional Technologies 0 Active
US10510932B2 Optoelectronic modules including optoelectronic device subassemblies and methods of manufacturing the same Electricity 0 Active
US10199426B2 Optoelectronic modules that have shielding to reduce light leakage or stray light, and fabrication methods for such modules Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.