Inventor · Cupertino, CA, US

Yan Chen

45Patents
5h-index
56Co-inventors
68Inventor score

Filing activity: Feb 7, 2006 → Dec 5, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7467064B2 Transforming metrology data from a semiconductor treatment system using multivariate analysis Physics 11 Active
US7327475B1 Measuring a process parameter of a semiconductor fabrication process using optical metrology Electricity 11 Active
US9217848B1 Mobile device and optical imaging lens thereof Electricity 11 Active
US9330990B2 Method of endpoint detection of plasma etching process using multivariate analysis Electricity 9 Active
US8170833B2 Transforming metrology data from a semiconductor treatment system using multivariate analysis Physics 8 Active
US7522294B2 Measuring a process parameter of a semiconductor fabrication process using optical metrology Electricity 4 Active
US9970818B2 Spatially resolved optical emission spectroscopy (OES) in plasma processing Physics 4 Active
US10002804B2 Method of endpoint detection of plasma etching process using multivariate analysis Electricity 4 Active
US7523021B2 Weighting function to enhance measured diffraction signals in optical metrology Physics 3 Active
US10453653B2 Endpoint detection algorithm for atomic layer etching (ALE) Electricity 3 Active
US10473525B2 Spatially resolved optical emission spectroscopy (OES) in plasma processing Physics 3 Active
US9851532B2 Mobile device and optical imaging lens thereof Physics 2 Active
US8346506B2 Transforming metrology data from a semiconductor treatment system using multivariate analysis Physics 2 Active
US7428044B2 Drift compensation for an optical metrology tool Physics 2 Active
US10332861B2 Interconnection structures and methods for making the same Electricity 2 Active
US9857558B1 Optical imaging lens Physics 2 Active
US11538723B2 Optical diagnostics of semiconductor process using hyperspectral imaging Electricity 1 Active
US9798108B2 Mobile device and optical imaging lens thereof Physics 1 Active
US8929000B2 Mobile device and optical imaging lens thereof Electricity 1 Active
US9341816B2 Mobile device and optical imaging lens thereof Electricity 1 Active
US9377602B2 Imaging lens, and electronic apparatus including the same Physics 1 Active
US9541734B2 Mobile device and optical imaging lens thereof Physics 1 Active
US9217843B2 Mobile device and optical imaging lens thereof Physics 1 Active
US9557525B2 Mobile device and optical imaging lens thereof Electricity 1 Active
US10205520B2 Method and device for measuring optical signal-to-noise ratio Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.