Yasusuke Sumitomo
7Patents
7h-index
6Co-inventors
45Inventor score
Filing activity: Oct 26, 1976 → Aug 31, 1978
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4151034A | Continuous gas plasma etching apparatus | Electricity | 71 | Expired |
| US4094722A | Etching apparatus using a plasma | Electricity | 35 | Expired |
| US4252595A | Etching apparatus using a plasma | Electricity | 32 | Expired |
| US4123565A | Method of manufacturing semiconductor devices | Emerging Cross-Sectional Technologies | 23 | Expired |
| US4131909A | Semiconductor integrated circuit isolated through dielectric material and a method for manufacturing the same | Electricity | 20 | Expired |
| US4185294A | Semiconductor device and a method for manufacturing the same | Electricity | 11 | Expired |
| US4216491A | Semiconductor integrated circuit isolated through dielectric material | Electricity | 7 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.