Young Dae CHUNG
9Patents
1h-index
24Co-inventors
40Inventor score
Filing activity: Oct 17, 2020 → Dec 28, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11923213B2 | Substrate heating unit, substrate processing apparatus, and substrate processing method | Electricity | 1 | Active |
| US11715651B2 | Apparatus for and method of treating substrate | Electricity | 0 | Active |
| US12094733B2 | Substrate treatment apparatus | Chemistry; Metallurgy | 0 | Active |
| US12381097B2 | Substrate treating apparatus | Physics | 0 | Active |
| US12148674B2 | Substrate processing control using a measured size distribution of by-product particles | Electricity | 0 | Active |
| US12381084B2 | Apparatus and method for treating substrate | Electricity | 0 | Active |
| US12055857B2 | Mask processing apparatus and substrate processing apparatus | Physics | 0 | Active |
| US11495467B2 | Method and apparatus for etching thin layer | Electricity | 0 | Active |
| US12224200B2 | Substrate treating apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.