Yuji Kamikawa
86Patents
18h-index
67Co-inventors
87Inventor score
Filing activity: Nov 13, 1991 → Aug 15, 2014
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6247479A | Washing/drying process apparatus and washing/drying process method | Emerging Cross-Sectional Technologies | 84 | Expired |
| US5940985A | Apparatus and method for drying substrates | Electricity | 83 | Expired |
| US6164297A | Cleaning and drying apparatus for objects to be processed | Emerging Cross-Sectional Technologies | 69 | Expired |
| US6029371A | Drying treatment method and apparatus | Electricity | 58 | Expired |
| US6861371B2 | Substrate processing system and substrate processing method | Emerging Cross-Sectional Technologies | 42 | Expired |
| US6009890A | Substrate transporting and processing system | Emerging Cross-Sectional Technologies | 42 | Expired |
| US6299696A | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 30 | Expired |
| US6131588A | Apparatus for and method of cleaning object to be processed | Emerging Cross-Sectional Technologies | 29 | Expired |
| US6119367A | System for drying semiconductor wafers using ultrasonic or low frequency vibration | Electricity | 29 | Expired |
| US6050275A | Apparatus for and method of cleaning objects to be processed | Emerging Cross-Sectional Technologies | 27 | Expired |
| US5488964A | Washing apparatus, and washing method | Emerging Cross-Sectional Technologies | 25 | Expired |
| US6068002A | Cleaning and drying apparatus, wafer processing system and wafer processing method | Emerging Cross-Sectional Technologies | 25 | Expired |
| US6575178B1 | Cleaning and drying method and apparatus | Emerging Cross-Sectional Technologies | 25 | Expired |
| US6045624A | Apparatus for and method of cleaning objects to be processed | Emerging Cross-Sectional Technologies | 24 | Expired |
| US6158449A | Cleaning and drying method and apparatus | Emerging Cross-Sectional Technologies | 23 | Expired |
| US5213118A | Treatment apparatus | Emerging Cross-Sectional Technologies | 21 | Expired |
| US6241827A | Method for cleaning a workpiece | Emerging Cross-Sectional Technologies | 19 | Expired |
| US6342104B1 | Method of cleaning objects to be processed | Emerging Cross-Sectional Technologies | 18 | Expired |
| US8851819B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 17 | Active |
| US6589359B2 | Cleaning method and cleaning apparatus for substrate | Emerging Cross-Sectional Technologies | 17 | Expired |
| US8002511B2 | Batch forming apparatus, substrate processing system, batch forming method, and storage medium | Electricity | 16 | Active |
| US6158447A | Cleaning method and cleaning equipment | Emerging Cross-Sectional Technologies | 16 | Expired |
| US5862823A | Substrate cleaning method and a substrate cleaning apparatus | Emerging Cross-Sectional Technologies | 16 | Expired |
| US6647642B2 | Liquid processing apparatus and method | Electricity | 15 | Expired |
| US7593625B2 | Fluid heating apparatus | Mechanical Engineering; Lighting; Heating | 15 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.