Inventor · Campbell, CA, US

Zhigang Chen

90Patents
16h-index
124Co-inventors
87Inventor score

Filing activity: May 9, 2000 → Apr 17, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US9741546B2 Symmetric plasma process chamber Electricity 365 Active
US9852889B1 Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring Electricity 105 Active
US6680976B1 Robust, reliable compression and packetization scheme for transmitting video Electricity 87 Expired
US9536749B2 Ion energy control by RF pulse shape Electricity 57 Active
US10115568B2 Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring Electricity 47 Active
US8313664B2 Efficient and accurate method for real-time prediction of the self-bias voltage of a wafer and feedback control of ESC voltage in plasma processing chamber Electricity 35 Active
US8933628B2 Inductively coupled plasma source with phase control Electricity 35 Active
US10546728B2 Symmetric plasma process chamber Electricity 35 Active
US10580620B2 Symmetric plasma process chamber Electricity 33 Active
US10453656B2 Symmetric plasma process chamber Electricity 33 Active
US10535502B2 Symmetric plasma process chamber Electricity 32 Active
US10026592B2 Systems and methods for tailoring ion energy distribution function by odd harmonic mixing Electricity 32 Active
US9385021B2 Electronic knob for tuning radial etch non-uniformity at VHF frequencies Electricity 27 Active
US9705289B2 High brightness multijunction diode stacking Electricity 22 Active
US9578722B2 Methods for selecting and controlling devices Physics 19 Active
US9096773B2 Highly functional epoxidized resins and coatings Chemistry; Metallurgy 16 Active
US7394535B1 Optical metrology using a photonic nanojet Physics 16 Active
US9862141B2 Selective laser-assisted transfer of discrete components Electricity 13 Active
US9620334B2 Control of etch rate using modeling, feedback and impedance match Electricity 13 Active
US8206552B2 RF power delivery system in a semiconductor apparatus Electricity 8 Active
US8920597B2 Symmetric VHF source for a plasma reactor Electricity 6 Active
US10283330B2 Systems and methods for achieving a pre-determined factor associated with an edge region within a plasma chamber by synchronizing main and edge RF generators Electricity 5 Active
US10833482B2 Diode laser apparatus with FAC lens out-of-plane beam steering Electricity 5 Active
US10615003B2 Systems and methods for controlling directionality of ions in an edge region by using an electrode within a coupling ring Electricity 5 Active
US10002746B1 Multi regime plasma wafer processing to increase directionality of ions Electricity 4 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.