Electronic fuse having a damaged region
US9059170B2 · kind B2 · utility
11Cited by
24References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Feb 6, 2013 |
| Grant date | Jun 16, 2015 |
| Priority date | — |
| Expiry date | Jun 20, 2033 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
An electronic fuse structure including an Mx level comprising an Mx metal, and an Mx+1 level above the Mx level, the Mx+1 level including an Mx+1 metal and a via electrically connecting the Mx metal to the Mx+1 metal in a vertical orientation, where the Mx+1 metal comprises a thick portion and a thin portion, and where the Mx metal, the Mx+1 metal, and the via are substantially filled with a conductive material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.