Patent · US Active

Back-end electrically programmable fuse

US9685404B2 · kind B2 · utility

11Cited by

15References

11Claims

0Family size

Assignee

International Business Machines Corporation · US

Inventors

Junjing Bao · Fishkill, US
Griselda Bonilla · Hopewell Junction, US
Kaushik Chanda · Fishkill, US
Samuel S. Choi · Hopewell Junction, US
Ronald G. Filippi · Wappingers Falls, US
Stephan Grunow · Poughkeepsie, US
Naftali E. Lustig · Ossining, US
Dan Moy · Bethel, US
Andrew H. Simon · Fishkill, US

Key dates

Filing date	Jan 11, 2012
Grant date	Jun 20, 2017
Priority date	—
Expiry date	Nov 26, 2032

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/0002
WIPO fieldSemiconductors
WIPO sectorElectrical engineering

Abstract

A BEOL e-fuse is disclosed which reliably blows in the via and can be formed even in the tightest pitch BEOL layers. The BEOL e-fuse can be formed utilizing a line first dual damascene process to create a sub-lithographic via to be the programmable link of the e-fuse. The sub-lithographic via can be patterned using standard lithography and the cross section of the via can be tuned to match the target programming current.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.