FNS TECH CO., LTD.
8Patents
8Active
8Granted
44Portfolio score
Filing activity: Aug 4, 2008 → Jun 28, 2019 · 1 expiring within 5 years
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8684794B2 | Chemical mechanical planarization pad with void network | Performing Operations; Transporting | 15 | Active |
| US9162341B2 | Chemical-mechanical planarization pad including patterned structural domains | Performing Operations; Transporting | 15 | Active |
| US9375822B2 | Polishing pad having micro-grooves on the pad surface | Performing Operations; Transporting | 12 | Active |
| US8758659B2 | Method of grooving a chemical-mechanical planarization pad | Performing Operations; Transporting | 1 | Active |
| US11541504B2 | Recycled polishing pad | Performing Operations; Transporting | 0 | Active |
| US9827646B2 | Polishing pad and preparing method thereof | Performing Operations; Transporting | 0 | Active |
| US9796063B2 | Multi-layered chemical-mechanical planarization pad | Performing Operations; Transporting | 0 | Active |
| US8790165B2 | Multi-layered chemical-mechanical planarization pad | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.