Anthony Sayka
15Patents
9h-index
18Co-inventors
61Inventor score
Filing activity: Mar 20, 1992 → Aug 1, 2000
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5668452A | Magnetic sensing robotics for automated semiconductor wafer processing systems | Emerging Cross-Sectional Technologies | 40 | Expired |
| US5743135A | Optical-fiber liquid-level monitor | Emerging Cross-Sectional Technologies | 30 | Expired |
| US5349237A | Integrated circuit package including a heat pipe | Electricity | 23 | Expired |
| US5472825A | Metal interconnect fabrication with dual plasma silicon dioxide deposition and etchback | Electricity | 21 | Expired |
| US5284801A | Methods of moisture protection in semiconductor devices utilizing polyimides for inter-metal dielectric | Electricity | 18 | Expired |
| US5392113A | Semiconductor wafer defect monitoring | Physics | 14 | Expired |
| US5312039A | Electro-optic monitor for fluid spray pattern | Performing Operations; Transporting | 10 | Expired |
| US5631799A | Fusion heat sink for integrated circuit | Electricity | 9 | Expired |
| US5477409A | Fusion heat sink for integrated circuit | Electricity | 9 | Expired |
| US5509375A | Apparatus and method for detecting contaminants carried by a fluid | Performing Operations; Transporting | 8 | Expired |
| US5313818A | Contaminant monitor for a flowing liquid | Physics | 6 | Expired |
| US6766813B1 | Apparatus and method for cleaning a wafer | Emerging Cross-Sectional Technologies | 6 | Expired |
| US5310621A | Semiconductor photolithography with superficial plasma etch | Physics | 4 | Expired |
| US5772769A | Apparatus for coating a workpiece with fluid contamination detection | Performing Operations; Transporting | 1 | Expired |
| US5558902A | Method for detecting contaminants carried by a fluid | Performing Operations; Transporting | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.