Inventor · Tachikawa, JP

Atsushi Ogishima

19Patents
9h-index
45Co-inventors
68Inventor score

Filing activity: May 7, 1992 → Aug 18, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US6503794B1 Semiconductor integrated circuit device and method for manufacturing the same Emerging Cross-Sectional Technologies 66 Expired
US6762449B2 SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE AND THE PROCESS OF MANUFACTURING THE SAME HAVING POLY-SILICON PLUG, WIRING TRENCHES AND BIT LINES FORMED IN THE WIRING TRENCHES HAVING A WIDTH FINER THAN A PREDETERMINED SIZE Electricity 64 Expired
US6743673B2 Semiconductor integrated circuitry and method for manufacturing the circuitry Emerging Cross-Sectional Technologies 49 Expired
US5734188A Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same Electricity 37 Expired
US5917211A Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same Electricity 21 Expired
US5264712A Semiconductor integrated circuit, method of fabricating the same and apparatus for fabricating the same Electricity 21 Expired
US6573170B2 Process for multilayer wiring connections and bonding pad adhesion to dielectric in a semiconductor integrated circuit device Electricity 18 Expired
US6287914A Method of forming a MISFET device with a bit line completely surrounded by dielectric Electricity 11 Expired
US6734479B1 Semiconductor integrated circuit device and the method of producing the same Electricity 10 Expired
US6562695B1 Semiconductor integrated circuit device and method of manufacturing involving the scale-down width of shallow groove isolation using round processing Electricity 6 Expired
US6204184A Method of manufacturing semiconductor devices Electricity 6 Expired
US6867092B2 Semiconductor integrated circuit device and the process of manufacturing the same for reducing the size of a memory cell by making the width of a bit line than a predetermined minimum size Electricity 6 Expired
US7026679B2 Semiconductor integrated circuit device and the process of manufacturing the same having poly-silicon plug, wiring trenches and bit lines formed in the wiring trenches having a width finer than a predetermined size Electricity 3 Expired
US7081649B2 Semiconductor integrated circuitry and method for manufacturing the circuitry Emerging Cross-Sectional Technologies 3 Expired
US6800888B2 Semiconductor integrated circuitry and method for manufacturing the circuitry Emerging Cross-Sectional Technologies 2 Expired
US6720234B2 Semiconductor integrated circuit device and method of manufacturing involving the scale-down width of shallow groove isolation using round processing Electricity 2 Expired
US6498100B2 Method of manufacturing semiconductor devices Electricity 0 Expired
US7397104B2 Semiconductor integrated circuit device and a method of manufacturing the same Electricity 0 Expired
US6380085B2 Method of manufacturing semiconductor devices Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.