Daemian Raj
11Patents
4h-index
28Co-inventors
56Inventor score
Filing activity: May 4, 2005 → Nov 27, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7572337B2 | Blocker plate bypass to distribute gases in a chemical vapor deposition system | Electricity | 28 | Active |
| US7622005B2 | Uniformity control for low flow process and chamber to chamber matching | Chemistry; Metallurgy | 13 | Active |
| US7829145B2 | Methods of uniformity control for low flow process and chamber to chamber matching | Chemistry; Metallurgy | 11 | Active |
| US10428426B2 | Method and apparatus to prevent deposition rate/thickness drift, reduce particle defects and increase remote plasma system lifetime | Electricity | 5 | Active |
| US9364871B2 | Method and hardware for cleaning UV chambers | Chemistry; Metallurgy | 4 | Active |
| US7189658B2 | Strengthening the interface between dielectric layers and barrier layers with an oxide layer of varying composition profile | Emerging Cross-Sectional Technologies | 3 | Expired |
| US9506145B2 | Method and hardware for cleaning UV chambers | Chemistry; Metallurgy | 3 | Active |
| US7273823B2 | Situ oxide cap layer development | Electricity | 2 | Expired |
| US11367594B2 | Multizone flow gasbox for processing chamber | Electricity | 0 | Active |
| US10934620B2 | Integration of dual remote plasmas sources for flowable CVD | Electricity | 0 | Active |
| US8349746B2 | Microelectronic structure including a low k dielectric and a method of controlling carbon distribution in the structure | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.