Inventor · Pleasanton, CA, US

Daxing Ren

9Patents
5h-index
18Co-inventors
52Inventor score

Filing activity: Feb 4, 2002 → Jun 21, 2007

Most-cited inventions

PatentTitleAreaCited byStatus
US7247579B2 Cleaning methods for silicon electrode assembly surface contamination removal Emerging Cross-Sectional Technologies 11 Expired
US7267741B2 Silicon carbide components of semiconductor substrate processing apparatuses treated to remove free-carbon Electricity 10 Expired
US7442114B2 Methods for silicon electrode assembly etch rate and etch uniformity recovery Electricity 9 Expired
US6846726B2 Silicon parts having reduced metallic impurity concentration for plasma reaction chambers Electricity 9 Expired
US8789493B2 Sealed elastomer bonded Si electrodes and the like for reduced particle contamination in dielectric etch Emerging Cross-Sectional Technologies 6 Active
US7498269B2 Cleaning methods for silicon electrode assembly surface contamination removal Emerging Cross-Sectional Technologies 5 Active
US7517803B2 Silicon parts having reduced metallic impurity concentration for plasma reaction chambers Electricity 5 Expired
US6780569B1 Post-development treatment of patterned photoresist to promote cross-linking of polymer chains Physics 3 Expired
US8679252B2 Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereof Electricity 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.