Daxing Ren
9Patents
5h-index
18Co-inventors
52Inventor score
Filing activity: Feb 4, 2002 → Jun 21, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7247579B2 | Cleaning methods for silicon electrode assembly surface contamination removal | Emerging Cross-Sectional Technologies | 11 | Expired |
| US7267741B2 | Silicon carbide components of semiconductor substrate processing apparatuses treated to remove free-carbon | Electricity | 10 | Expired |
| US7442114B2 | Methods for silicon electrode assembly etch rate and etch uniformity recovery | Electricity | 9 | Expired |
| US6846726B2 | Silicon parts having reduced metallic impurity concentration for plasma reaction chambers | Electricity | 9 | Expired |
| US8789493B2 | Sealed elastomer bonded Si electrodes and the like for reduced particle contamination in dielectric etch | Emerging Cross-Sectional Technologies | 6 | Active |
| US7498269B2 | Cleaning methods for silicon electrode assembly surface contamination removal | Emerging Cross-Sectional Technologies | 5 | Active |
| US7517803B2 | Silicon parts having reduced metallic impurity concentration for plasma reaction chambers | Electricity | 5 | Expired |
| US6780569B1 | Post-development treatment of patterned photoresist to promote cross-linking of polymer chains | Physics | 3 | Expired |
| US8679252B2 | Actively heated aluminum baffle component having improved particle performance and methods of use and manufacture thereof | Electricity | 2 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.