Inventor · Radebeul, DE

Eckhard Langer

10Patents
3h-index
11Co-inventors
53Inventor score

Filing activity: Apr 11, 2002 → Oct 13, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US8329577B2 Method of forming an alloy in an interconnect structure to increase electromigration resistance Electricity 6 Active
US7611991B2 Technique for increasing adhesion of metallization layers by providing dummy vias Electricity 5 Active
US7335880B2 Technique for CD measurement on the basis of area fraction determination Electricity 4 Active
US6953755B2 Technique for monitoring the state of metal lines in microstructures Physics 3 Expired
US7311008B2 Semiconductor structure comprising a stress sensitive element and method of measuring a stress in a semiconductor structure Electricity 3 Expired
US8118932B2 Technique for monitoring dynamic processes in metal lines of microstructures Emerging Cross-Sectional Technologies 1 Active
US8058731B2 Technique for forming metal lines in a semiconductor by adapting the temperature dependence of the line resistance Emerging Cross-Sectional Technologies 0 Active
US8575029B2 Technique for forming metal lines in a semiconductor by adapting the temperature dependence of the line resistance Emerging Cross-Sectional Technologies 0 Active
US6716650B2 Interface void monitoring in a damascene process Electricity 0 Expired
US8058081B2 Method of testing an integrity of a material layer in a semiconductor structure Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.