Eitan Hajaj
11Patents
2h-index
32Co-inventors
46Inventor score
Filing activity: Nov 4, 2016 → Jun 1, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US11796925B2 | Scanning overlay metrology using overlay targets having multiple spatial frequencies | Physics | 3 | Active |
| US10837919B2 | Single cell scatterometry overlay targets | Physics | 2 | Active |
| US10579768B2 | Process compatibility improvement by fill factor modulation | Electricity | 1 | Active |
| US11726410B2 | Multi-resolution overlay metrology targets | Electricity | 1 | Active |
| US11862524B2 | Overlay mark design for electron beam overlay | Electricity | 1 | Active |
| US12055859B2 | Overlay mark design for electron beam overlay | Physics | 0 | Active |
| US11720031B2 | Overlay design for electron beam and scatterometry overlay measurements | Physics | 0 | Active |
| US12105414B2 | Targets for diffraction-based overlay error metrology | Electricity | 0 | Active |
| US11676909B2 | Metrology targets for high topography semiconductor stacks | Electricity | 0 | Active |
| US11703767B2 | Overlay mark design for electron beam overlay | Physics | 0 | Active |
| US12111580B2 | Optical metrology utilizing short-wave infrared wavelengths | Physics | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.