Inventor · Fremont, CA, US

Gorley Lau

9Patents
5h-index
9Co-inventors
48Inventor score

Filing activity: Nov 13, 1997 → Dec 3, 2002

Most-cited inventions

PatentTitleAreaCited byStatus
US6140228A Low temperature metallization process Electricity 48 Expired
US6969448B1 Method for forming a metallization structure in an integrated circuit Electricity 45 Expired
US6756302B1 Low temperature metallization process Electricity 11 Expired
US6187667A Method of forming metal layer(s) and/or antireflective coating layer(s) on an integrated circuit Electricity 7 Expired
US6906421B1 Method of forming a low resistivity Ti-containing interconnect and semiconductor device comprising the same Electricity 7 Expired
US6774033B1 Metal stack for local interconnect layer Electricity 5 Expired
US6455427B1 Method for forming void-free metallization in an integrated circuit Electricity 3 Expired
US6977217B1 Aluminum-filled via structure with barrier layer Electricity 2 Expired
US6534398B2 Method of forming metal layer(s) and/or antireflective coating layer(s) on an integrated circuit Electricity 1 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.