Inventor · Ebeye, MH, US

Hideaki Hara

43Patents
9h-index
39Co-inventors
75Inventor score

Filing activity: Dec 15, 1987 → Jul 21, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US6172373A Stage apparatus with improved positioning capability Physics 29 Expired
US5839324A Stage apparatus and exposure apparatus provided with the stage apparatus Emerging Cross-Sectional Technologies 25 Expired
US6158298A Stage apparatus and exposure apparatus provided with the stage apparatus Emerging Cross-Sectional Technologies 23 Expired
US5959732A Stage apparatus and a stage control method Physics 19 Expired
US7480029B2 Exposure apparatus and method for manufacturing device Physics 18 Expired
US7826031B2 Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method Physics 16 Active
US7563906B2 Indazole derivatives Chemistry; Metallurgy 12 Expired
US5801308A Measuring apparatus for measuring an injected quantity of liquid Emerging Cross-Sectional Technologies 11 Expired
US6591689B2 Sensor held by base having lead Electricity 11 Expired
US7847916B2 Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method Physics 9 Active
US9114070B2 Liposome for delivery to posterior segment of eye and pharmaceutical composition for disease in posterior segment of eye Human Necessities 7 Active
US6212942A Leakage inspection method and apparatus Physics 5 Expired
US9821469B2 Carrier system, exposure apparatus, carrier method, exposure method, device manufacturing method, and suction device Electricity 5 Active
US6407799B2 Stage control method using a temperature Physics 3 Expired
US8111373B2 Exposure apparatus and device fabrication method Physics 3 Active
US7229541B2 Processing solution tank Chemistry; Metallurgy 3 Expired
US4877790A Quinazoline derivative, processes for its production, and cerebral dysfunction remedying agent comprising it as active ingredient Chemistry; Metallurgy 3 Expired
US8169590B2 Exposure apparatus and device fabrication method Physics 2 Active
US8411248B2 Exposure apparatus and device fabrication method Physics 2 Active
US7972612B2 Remedy for glaucoma comprising Rho kinase inhibitor and β-blocker Human Necessities 2 Active
US9411248B2 Exposure apparatus and device fabrication method Physics 1 Active
US6387910B1 Drug of improving optic nerve head circulation disorder Human Necessities 1 Expired
US9046790B2 Exposure apparatus and device fabrication method Physics 1 Active
US7855222B2 Methods for treating a disease in which Rho kinase is involved Chemistry; Metallurgy 1 Active
US8537331B2 Exposure apparatus and method for manufacturing device Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.