Inventor · Yokohama, JP

Hideyuki Kito

7Patents
5h-index
8Co-inventors
48Inventor score

Filing activity: Jul 12, 1995 → Oct 12, 2001

Most-cited inventions

PatentTitleAreaCited byStatus
US6383907B1 Process for fabricating a semiconductor device Electricity 166 Expired
US6407011B1 Low dielectric constant insulating films with laminated carbon-containing silicon oxide and organic layers Electricity 38 Expired
US5578530A Manufacturing method of semiconductor device which includes forming a silicon nitride layer using a Si, N, and F containing compound Electricity 16 Expired
US6709979B2 Method of manufacturing a semiconductor device Electricity 11 Expired
US6878632B2 Semiconductor device having a conductive layer with a cobalt tungsten phosphorus coating and a manufacturing method thereof Electricity 7 Expired
US6602787B2 Method for fabricating semiconductor devices Electricity 3 Expired
US6736699B2 Electrolytic polishing apparatus, electrolytic polishing method and wafer subject to polishing Emerging Cross-Sectional Technologies 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.