Hiroshi Shinya
18Patents
8h-index
24Co-inventors
72Inventor score
Filing activity: Mar 8, 1988 → Jun 7, 2011
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5876280A | Substrate treating system and substrate treating method | Emerging Cross-Sectional Technologies | 53 | Expired |
| US5928390A | Vertical processing apparatus | Electricity | 33 | Expired |
| US6957378B2 | Semiconductor memory device | Physics | 26 | Expired |
| US6796054B2 | Low-pressure dryer and low-pressure drying method | Emerging Cross-Sectional Technologies | 23 | Expired |
| US6573031B2 | Apparatus and method of thermal processing and method of pattern formation | Physics | 16 | Expired |
| US4849653A | Semiconductor circuit device for preventing an output of a bistable circuit from becoming unstable | Electricity | 15 | Expired |
| US6570801B2 | Semiconductor memory having refresh function | Physics | 9 | Expired |
| US7980003B2 | Heat processing apparatus and heat processing method | Electricity | 9 | Active |
| US7060939B2 | Substrate heating method, substrate heating system, and applying developing system | Electricity | 5 | Expired |
| US6986214B2 | Low-pressure dryer and low-pressure drying method | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7385849B2 | Semiconductor integrated circuit device | Physics | 5 | Active |
| US7024798B2 | Low-pressure dryer and low-pressure drying method | Emerging Cross-Sectional Technologies | 5 | Expired |
| US7266759B2 | Semiconductor integrated circuit device and error checking and correcting method thereof | Physics | 4 | Expired |
| US8782918B2 | Heat processing apparatus and heat processing method | Electricity | 3 | Active |
| US7050710B2 | Thermal treatment equipment and thermal treatment method | Electricity | 3 | Expired |
| US7757626B2 | Substrate processing apparatus and substrate processing method | Performing Operations; Transporting | 3 | Active |
| US7223945B2 | Substrate heating method, substrate heating system, and applying developing system | Electricity | 1 | Expired |
| US8192796B2 | Substrate processing apparatus and substrate processing method | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.