Inventor · Tokyo, JP

Hiroshi Tobimatsu

12Patents
5h-index
24Co-inventors
66Inventor score

Filing activity: Mar 29, 1990 → Nov 29, 2010

Most-cited inventions

PatentTitleAreaCited byStatus
US5171711A Method of manufacturing integrated circuit devices Emerging Cross-Sectional Technologies 39 Expired
US5600151A Semiconductor device comprising a semiconductor substrate, an element formed thereon, and a stress-buffering film made of a silicone ladder resin Electricity 12 Expired
US6046488A Semiconductor device having conductive layer and manufacturing method thereof Electricity 9 Expired
US6645859B1 Semiconductor device and manufacturing method thereof Electricity 8 Expired
US7154184B2 Interconnection structure of semiconductor device Electricity 7 Expired
US5126828A Wafer scale integration device Electricity 5 Expired
US6544904B1 Method of manufacturing semiconductor device Electricity 4 Expired
US7851355B2 Method of manufacturing semiconductor device Electricity 1 Active
US7582950B2 Semiconductor chip having gettering layer, and method for manufacturing the same Electricity 1 Active
US7489040B2 Interconnection structure of semiconductor device Electricity 0 Active
US8021979B2 Method of manufacturing semiconductor device Electricity 0 Active
US6759317B2 Method of manufacturing semiconductor device having passivation film and buffer coating film Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.