Jeff Tobin
12Patents
8h-index
13Co-inventors
65Inventor score
Filing activity: Mar 4, 1999 → Nov 22, 2013
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7790633B1 | Sequential deposition/anneal film densification method | Electricity | 598 | Active |
| US7482247B1 | Conformal nanolaminate dielectric deposition and etch bag gap fill process | Electricity | 530 | Active |
| US7148155B1 | Sequential deposition/anneal film densification method | Electricity | 384 | Expired |
| US7297608B1 | Method for controlling properties of conformal silica nanolaminates formed by rapid vapor deposition | Electricity | 60 | Expired |
| US7202185B1 | Silica thin films produced by rapid surface catalyzed vapor deposition (RVD) using a nucleation layer | Electricity | 33 | Expired |
| US7097878B1 | Mixed alkoxy precursors and methods of their use for rapid vapor deposition of SiO2 films | Chemistry; Metallurgy | 23 | Expired |
| US7271112B1 | Methods for forming high density, conformal, silica nanolaminate films via pulsed deposition layer in structures of confined geometry | Electricity | 13 | Expired |
| US7223707B1 | Dynamic rapid vapor deposition process for conformal silica laminates | Electricity | 9 | Expired |
| US7294583B1 | Methods for the use of alkoxysilanol precursors for vapor deposition of SiO2 films | Electricity | 6 | Expired |
| US6314885A | Imposition proofing | Emerging Cross-Sectional Technologies | 2 | Expired |
| US6299160A | Imposition proofing | Performing Operations; Transporting | 1 | Expired |
| US10020187B2 | Apparatus and methods for backside passivation | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.