Luping Wang
30Patents
17h-index
32Co-inventors
81Inventor score
Filing activity: Apr 28, 1998 → Jul 6, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6909839B2 | Delivery systems for efficient vaporization of precursor source material | Performing Operations; Transporting | 567 | Expired |
| US7437060B2 | Delivery systems for efficient vaporization of precursor source material | Performing Operations; Transporting | 539 | Active |
| US6089027A | Fluid storage and dispensing system | Emerging Cross-Sectional Technologies | 110 | Expired |
| US6101816A | Fluid storage and dispensing system | Emerging Cross-Sectional Technologies | 90 | Expired |
| US6561213B2 | Fluid distribution system and process, and semiconductor fabrication facility utilizing same | Emerging Cross-Sectional Technologies | 62 | Expired |
| US6660063B2 | Sorbent-based gas storage and delivery system | Mechanical Engineering; Lighting; Heating | 47 | Expired |
| US6453924B1 | Fluid distribution system and process, and semiconductor fabrication facility utilizing same | Emerging Cross-Sectional Technologies | 45 | Expired |
| US6343476B1 | Gas storage and dispensing system comprising regulator interiorly disposed in fluid containment vessel and adjustable in situ therein | Emerging Cross-Sectional Technologies | 38 | Expired |
| US6620256B1 | Non-plasma in-situ cleaning of processing chambers using static flow methods | Mechanical Engineering; Lighting; Heating | 38 | Expired |
| US6592653B2 | Fluid storage and delivery system utilizing low heels carbon sorbent medium | Emerging Cross-Sectional Technologies | 37 | Expired |
| US6257000A | Fluid storage and dispensing system featuring interiorly disposed and exteriorly adjustable regulator for high flow dispensing of gas | Emerging Cross-Sectional Technologies | 29 | Expired |
| US6360546B1 | Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing | Mechanical Engineering; Lighting; Heating | 27 | Expired |
| US7105037B2 | Semiconductor manufacturing facility utilizing exhaust recirculation | Emerging Cross-Sectional Technologies | 25 | Expired |
| US6620225B2 | Adsorbents for low vapor pressure fluid storage and delivery | Emerging Cross-Sectional Technologies | 22 | Expired |
| US6805728B2 | Method and apparatus for the abatement of toxic gas components from a semiconductor manufacturing process effluent stream | Performing Operations; Transporting | 20 | Expired |
| US6857447B2 | Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases | Emerging Cross-Sectional Technologies | 20 | Expired |
| US6716271B1 | Apparatus and method for inhibiting decomposition of germane | Emerging Cross-Sectional Technologies | 20 | Expired |
| US6740586B1 | Vapor delivery system for solid precursors and method of using same | Electricity | 16 | Expired |
| US6083298A | Process for fabricating a sorbent-based gas storage and dispensing system, utilizing sorbent material pretreatment | Emerging Cross-Sectional Technologies | 15 | Expired |
| US7485169B2 | Semiconductor manufacturing facility utilizing exhaust recirculation | Emerging Cross-Sectional Technologies | 14 | Active |
| US6474076B2 | Fluid storage and dispensing system featuring externally adjustable regulator assembly for high flow dispensing | Mechanical Engineering; Lighting; Heating | 13 | Expired |
| US7048785B2 | Adsorbents for low vapor pressure fluid storage and delivery | Emerging Cross-Sectional Technologies | 12 | Expired |
| US7798168B2 | Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases | Emerging Cross-Sectional Technologies | 4 | Active |
| US8562937B2 | Production of carbon nanotubes | Emerging Cross-Sectional Technologies | 3 | Active |
| US7328716B2 | Pressure-based gas delivery system and method for reducing risks associated with storage and delivery of high pressure gases | Emerging Cross-Sectional Technologies | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.