Inventor · Wilsonville, OR, US

Mandar B. Pandit

17Patents
6h-index
45Co-inventors
62Inventor score

Filing activity: Oct 22, 2004 → Jul 10, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9343272B1 Self-aligned process Electricity 147 Active
US9355862B2 Fluorine-based hardmask removal Electricity 147 Active
US9373522B1 Titanium nitride removal Electricity 140 Active
US9478434B2 Chlorine-based hardmask removal Electricity 133 Active
US9721784B2 Ultra-conformal carbon film deposition Electricity 23 Active
US9659769B1 Tensile dielectric films using UV curing Electricity 6 Active
US9390910B2 Gas flow profile modulated control of overlay in plasma CVD films Electricity 5 Active
US10074534B2 Ultra-conformal carbon film deposition Electricity 5 Active
US10373822B2 Gas flow profile modulated control of overlay in plasma CVD films Electricity 2 Active
US9837265B2 Gas flow profile modulated control of overlay in plasma CVD films Electricity 1 Active
US11699623B2 Systems and methods for analyzing defects in CVD films Electricity 1 Active
US10566206B2 Systems and methods for anisotropic material breakthrough Electricity 0 Active
US12300554B2 Systems and methods for analyzing defects in CVD films Electricity 0 Active
US10490406B2 Systems and methods for material breakthrough Electricity 0 Active
US10354889B2 Non-halogen etching of silicon-containing materials Electricity 0 Active
US9355820B2 Methods for removing carbon containing films Electricity 0 Active
US9337314B2 Technique for selectively processing three dimensional device Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.