Mark Hawkins
49Patents
23h-index
55Co-inventors
88Inventor score
Filing activity: Jun 24, 1987 → Jun 15, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5221556A | Gas injectors for reaction chambers in CVD systems | Chemistry; Metallurgy | 665 | Expired |
| US6053982A | Wafer support system | Electricity | 649 | Expired |
| US5997588A | Semiconductor processing system with gas curtain | Emerging Cross-Sectional Technologies | 589 | Expired |
| US6093252A | Process chamber with inner support | Electricity | 540 | Expired |
| US6692576B2 | Wafer support system | Electricity | 517 | Expired |
| US4828224A | Chemical vapor deposition system | Emerging Cross-Sectional Technologies | 485 | Expired |
| US10167557B2 | Gas distribution system, reactor including the system, and methods of using the same | Emerging Cross-Sectional Technologies | 429 | Active |
| US6126744A | Method and system for adjusting semiconductor processing equipment | Chemistry; Metallurgy | 389 | Expired |
| US6821825B2 | Process for deposition of semiconductor films | Emerging Cross-Sectional Technologies | 240 | Expired |
| US5469356A | System for controlling a vehicle to selectively allow operation in either an autonomous mode or a manual mode | Physics | 110 | Expired |
| US6113702A | Wafer support system | Electricity | 52 | Expired |
| US5435682A | Chemical vapor desposition system | Emerging Cross-Sectional Technologies | 50 | Expired |
| US6343183B1 | Wafer support system | Electricity | 49 | Expired |
| US6203622A | Wafer support system | Electricity | 45 | Expired |
| US5020475A | Substrate handling and transporting apparatus | Chemistry; Metallurgy | 43 | Expired |
| US5092728A | Substrate loading apparatus for a CVD process | Chemistry; Metallurgy | 42 | Expired |
| US5925081A | System and method for managing access to a load resource having a loading machine | Physics | 41 | Expired |
| US5525157A | Gas injectors for reaction chambers in CVD systems | Chemistry; Metallurgy | 34 | Expired |
| US6032093A | Apparatus and method for restricting implement movement of a work machine | Fixed Constructions | 31 | Expired |
| US7648579B2 | Substrate support system for reduced autodoping and backside deposition | Electricity | 30 | Expired |
| US6709267B1 | Substrate holder with deep annular groove to prevent edge heat loss | Emerging Cross-Sectional Technologies | 30 | Expired |
| US5411590A | Gas injectors for reaction chambers in CVD systems | Chemistry; Metallurgy | 28 | Expired |
| US5823295A | Lubrication control system for a work machine | Mechanical Engineering; Lighting; Heating | 25 | Expired |
| US5458918A | Gas injectors for reaction chambers in CVD systems | Chemistry; Metallurgy | 20 | Expired |
| US4874464A | Process for epitaxial deposition of silicon | Emerging Cross-Sectional Technologies | 19 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.