Masayoshi Imai
12Patents
3h-index
23Co-inventors
60Inventor score
Filing activity: Sep 21, 2001 → Mar 25, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7479205B2 | Substrate processing apparatus | Performing Operations; Transporting | 11 | Expired |
| US6951221B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 10 | Expired |
| US7267130B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 6 | Expired |
| US9666455B2 | Substrate cleaning apparatus | Electricity | 1 | Active |
| US7428907B2 | Substrate processing apparatus | Emerging Cross-Sectional Technologies | 1 | Expired |
| US11495475B2 | Method of cleaning a substrate | Electricity | 0 | Active |
| US10500691B2 | Substrate processing apparatus and substrate processing method | Chemistry; Metallurgy | 0 | Active |
| US11848216B2 | Cleaning apparatus for cleaning member, substrate cleaning apparatus and cleaning member assembly | Electricity | 0 | Active |
| US10438818B2 | Substrate processing apparatus and pipe cleaning method for substrate processing apparatus | Electricity | 0 | Active |
| US10229841B2 | Wafer drying apparatus and wafer drying method | Mechanical Engineering; Lighting; Heating | 0 | Active |
| US10985037B2 | Substrate cleaning apparatus, substrate cleaning method, and control method of substrate cleaning apparatus | Electricity | 0 | Active |
| US10607862B2 | Substrate cleaning apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.