Ming-Hui Lu
9Patents
3h-index
13Co-inventors
50Inventor score
Filing activity: Feb 27, 2009 → Mar 11, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8641920B2 | Polishing composition for planarizing metal layer | Chemistry; Metallurgy | 6 | Active |
| US9039925B2 | Polishing slurry composition | Electricity | 5 | Active |
| US9165760B2 | Cleaning composition and cleaning method using the same | Chemistry; Metallurgy | 4 | Active |
| US7763577B1 | Acidic post-CMP cleaning composition | Chemistry; Metallurgy | 1 | Active |
| US8901001B2 | Slurry composition and method of fabricating damascene structure using the same | Electricity | 1 | Active |
| US9493678B2 | Polishing composition | Electricity | 0 | Active |
| US8747693B2 | Silica having metal ions absorbed thereon and fabricating method thereof | Chemistry; Metallurgy | 0 | Active |
| US9718991B2 | Chemical mechanical polishing slurry | Chemistry; Metallurgy | 0 | Active |
| US10501660B2 | Method of selectively removing tungsten over silicon oxide | Performing Operations; Transporting | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.