Mitsuaki Komino
25Patents
20h-index
36Co-inventors
77Inventor score
Filing activity: Jul 28, 1993 → Feb 19, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5382311A | Stage having electrostatic chuck and plasma processing apparatus using same | Electricity | 899 | Expired |
| US6134807A | Drying processing method and apparatus using same | Electricity | 524 | Expired |
| US5769952A | Reduced pressure and normal pressure treatment apparatus | Emerging Cross-Sectional Technologies | 429 | Expired |
| US6156151A | Plasma processing apparatus | Electricity | 421 | Expired |
| US5478429A | Plasma process apparatus | Electricity | 368 | Expired |
| US5567267A | Method of controlling temperature of susceptor | Electricity | 164 | Expired |
| US5575853A | Vacuum exhaust system for processing apparatus | Chemistry; Metallurgy | 163 | Expired |
| US5665166A | Plasma processing apparatus | Electricity | 111 | Expired |
| US5376213A | Plasma processing apparatus | Electricity | 110 | Expired |
| US5625526A | Electrostatic chuck | Electricity | 105 | Expired |
| US5584971A | Treatment apparatus control method | Electricity | 81 | Expired |
| US6264788A | Plasma treatment method and apparatus | Emerging Cross-Sectional Technologies | 78 | Expired |
| US7033444B1 | Plasma processing apparatus, and electrode structure and table structure of processing apparatus | Electricity | 63 | Expired |
| US5581874A | Method of forming a bonding portion | Emerging Cross-Sectional Technologies | 61 | Expired |
| US6544380B2 | Plasma treatment method and apparatus | Emerging Cross-Sectional Technologies | 49 | Expired |
| US7337745B1 | Electrode, susceptor, plasma processing apparatus and method of making the electrode and the susceptor | Electricity | 45 | Expired |
| US5753891A | Treatment apparatus | Electricity | 39 | Expired |
| US6106737A | Plasma treatment method utilizing an amplitude-modulated high frequency power | Emerging Cross-Sectional Technologies | 34 | Expired |
| US6634845B1 | Transfer module and cluster system for semiconductor manufacturing process | Performing Operations; Transporting | 29 | Expired |
| US5660740A | Treatment apparatus control method | Electricity | 24 | Expired |
| US6157774A | Vapor generating method and apparatus using same | Performing Operations; Transporting | 18 | Expired |
| US6167323A | Method and system for controlling gas system | Electricity | 18 | Expired |
| US6131307A | Method and device for controlling pressure and flow rate | Mechanical Engineering; Lighting; Heating | 13 | Expired |
| US6431115B1 | Plasma treatment method and apparatus | Emerging Cross-Sectional Technologies | 11 | Expired |
| US6379756B2 | Plasma treatment method and apparatus | Emerging Cross-Sectional Technologies | 8 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.