Inventor · Nandlstadt, DE

Robert Gruenberger

9Patents
1h-index
12Co-inventors
44Inventor score

Filing activity: Jun 4, 2008 → Oct 21, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US7889030B2 Passive temperature compensation of silicon MEMS devices Electricity 12 Active
US8125046B2 Micro-electromechanical system devices Performing Operations; Transporting 1 Active
US10899604B2 Integration of stress decoupling and particle filter on a single wafer or in combination with a waferlevel package Performing Operations; Transporting 1 Active
US11505450B2 Integration of stress decoupling and particle filter on a single wafer or in combination with a waferlevel package Performing Operations; Transporting 0 Active
US8993394B2 Micro-electromechanical system devices Performing Operations; Transporting 0 Active
US11247895B2 Segmented stress decoupling via frontside trenching Performing Operations; Transporting 0 Active
US10807862B1 Segmented stress decoupling via frontside trenching Performing Operations; Transporting 0 Active
US10843916B2 Mechanical stress decoupling for microelectromechanical systems (MEMS) elements with gel-filling Performing Operations; Transporting 0 Active
US8318581B2 Micro-electromechanical system devices Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.